Web2 de ago. de 2014 · On-Wafer Measurements using IC-CAP WaferPro. Compare Models. Accurate DC/CV (and RF) statistical modeling of semiconductor devices requires … WebOnWafer Technologies 26 PEB Temp Control After Before Target 120oC 2.700oC 0.175oC 16 plates, 120 ºC Target OnWafer Technologies 27 Spatial PEB/CD Distribution Correlation 28 PEB Hotplate Critical Dimension Optimization System AutoCal AutoCD Plate Type Specific Thermal Profile Modeling Engine Resist Litho Cell Specific CD Modeling …
Wireless Metrology in Semiconductor Manufacturing
Web6 de dez. de 2004 · Automatic bake plate calibration Automatic bake plate calibration MacDonald, Paul 2004-12-06 00:00:00 In this paper, we introduce MaskTemp TM , a novel wireless metrology system to record in-situ the temperature of a reticle during processing. In combination with OnWafer Technologies' AutoCal bake plate optimization software, … WebEmployees at OnWafer Technologies Abhishek Saxena consaltant at OnWafer Technologies See all employees Similar pages GES Automation Machinery … how does a call work
OnWafer Technologies Company Profile: Acquisition & Investors
Web1 de mar. de 2007 · sensors from OnWafer Technologies. The baseline post-etch CD signature and plasma etch bias signature were extracted to characterize the lithography … Web1 de mai. de 2004 · This paper describes a novel approach to improving across-wafer CD uniformity through the litho-etch sequence. Our approach is to compensate for systematic CD perturbations by employing all... Webprocess monitoring,sputter etching,temperature sensors,data acquisition,elemental semiconductors,heat transfer,microsensors,process control,semiconductor process modelling,sensors,silicon,surface chemistry,thickness measurement,arrays,etching,integrated circuit manufacture,CMOS integrated … phonon anharmonicity in bulk zrte5